鏃朵唬鑺瓨 鍗婂浣撶鏅郴鍒椻€斺€斿厜鍒诲伐鑹虹畝浠?姹熻嫃鏃朵唬鍏ㄨ姱瀛樺偍绉戞妧鏈夐檺鍏徃-凯发网址是多少

闆嗘垚鐢佃矾锛堣姱鐗囷級锛坕ntegrated circuit锛夋槸鐜颁唬鏃ュ父鐢熸椿涓笉鍙垨缂虹殑銆傛墜鏈恒€佺數鑴戜互鍙婃墍鏈夋棩甯稿鐢典腑閮芥湁鑺墖鍦ㄩ粯榛樺湴宸ヤ綔銆傛鏄敱浜庤姱鐗囧姛鑳界殑鍗囩骇锛屾墠浣垮緱鎵嬫満瀹炵幇浜?g鍜?g 鍔熻兘锛涘钩鏉跨數鑴戝彲浠ラ泦鎴愬叏鐞冨畾浣嶇郴缁燂紙global positioning system锛孏ps锛夈€佹暟浣嶇浉鏈恒€佺綉缁滅數瑙嗙瓑澶氶」鍔熻兘锛岄煶棰?瑙嗛澶勭悊鑺墖鍙婇€氫俊绛夊祵鍏ュ紡鑺墖鏄笉鍙垨缂虹殑骞曞悗鍔熻嚕銆傚厜鍒绘槸闆嗘垚鐢佃矾鍒堕€犱腑鐨勫叧閿妧鏈紝涔熸槸鎵€鏈夊井绾冲櫒浠跺埗澶囪繃绋嬩腑蹇呬笉鍙皯鐨勪竴閬撳伐鑹恒€傛鏄敱浜庡厜鍒昏澶囥€佹潗鏂欏拰宸ヨ壓鐨勫彂灞曪紝鎵嶄娇寰楅泦鎴愮數璺笂鐨勫櫒浠惰秺鍋氳秺灏忥紝鑺墖鐨勯泦鎴愬害瓒婃潵瓒婇珮锛屽崟涓櫠浣撶鐨勫钩鍧囬€犱环瓒婃潵瓒婁綆銆?/span>

鍏夊埢锛坧hotolithography锛夋槸闆嗘垚鐢佃矾鍒堕€犱腑鐨勪竴閬撳叧閿伐鑹猴紝瀹冩槸鍒╃敤鍏夊寲瀛﹀弽搴斿師鐞嗘妸浜嬪厛鍒跺鍦ㄦ帺妯$増锛堢畝绉版帺妯★紝mask锛変笂鐨勫浘褰㈣浆鍗板埌涓€涓‖搴曪紙substrate锛変笂鐨勮繃绋嬶紝浣块€夋嫨鎬х殑鍒昏殌璺熺瀛愭敞鍏ユ垚涓哄彲鑳姐€?/span>

 

   

 

鍏夊埢浜?0涓栫邯60~70骞翠唬寮€濮嬭搴旂敤浜庣數瀛愬伐涓氾紝鐢佃矾鏉夸笂鐨勫鏉傜嚎璺氨鏄敤鍏夊埢鎶€鏈仛鍑烘潵鐨勩€傞偅鏃剁殑鍏夊埢鍩烘湰涓婇兘鏄帴瑙﹀紡鏇濆厜锛坈ontact exposure锛夛紝鍗虫洕鍏夋椂锛屾帺妯′笌娑備簡鍏夊埢鑳讹紙photo-resist锛夌殑琛簳鏄浉鎺ヨе鐨勩€備粠80骞翠唬寮€濮嬶紝鎶曞奖寮忔洕鍏夛紙projection exposure锛夎骞挎硾搴旂敤浜庨泦鎴愮數璺埗閫犱腑銆傛帺妯′綔涓轰竴涓厜瀛﹀厓浠跺祵鍏ュ湪鍏夊绯荤粺涓紝鏇濆厜鍏夌嚎閫忚繃鎺╂ā鏉匡紝缁忚繃鎶曞奖鍏夊绯荤粺锛坧rojection optics锛夋姇灏勫湪琛簳琛ㄩ潰锛涙帺妯′笉闇€瑕佷笌琛簳鐩存帴鎺ヨе锛堣繖绉嶆帺妯″張鏈変簡涓€涓柊鐨勮嫳鏂囧悕绉扳€漴eticle鈥濓級銆備粠姝わ紝鍏夊埢鎶€鏈殑鍙戝睍灏卞拰闆嗘垚鐢佃矾鑺傜偣锛坱echnology node锛夌殑鎺ㄨ繘锛堟懇灏斿畾寰嬶級瀵嗕笉鍙垎銆備竴鏂归潰锛屽厜鍒绘妧鏈殑鍙戝睍涓虹敓浜ф洿楂橀泦鎴愬害鐨勮姱鐗囨彁渚涙妧鏈繚璇侊紱鍙︿竴鏂归潰锛屽競鍦哄鏂版妧鏈妭鐐瑰櫒浠剁殑鏈熸湜鍙堜績杩涗簡鍏夊埢鎶€鏈殑蹇€熷彂灞曞拰浜т笟鍖栥€?/span>

鏁翠釜鍏夊埢宸ヨ壓闇€瑕佷娇鐢ㄨ澶氫笓涓氳澶囧拰鏉愭枡銆備笓鐢ㄨ澶囧寘鎷寑鑳舵樉褰辨満锛屽厜鍒绘満锛屽鍒荤簿搴﹂噺娴嬫満锛屾壂鎻忕數瀛愭樉寰暅鍙婃櫠鍦嗚繑宸ユ椂鐢ㄥ埌鐨勫幓鑳舵竻娲楁満銆備笓鐢ㄦ潗鏂欏寘鎷悇绉嶆姉鍙嶅皠娑傚眰銆佸厜鍒昏兌銆佹姉姘撮《鐩栨秱灞傘€佹樉褰辨恫浠ュ強鍚勭鏈夋満婧跺墏绛夈€傚湪鍏夊埢宸ヨ壓涓紝鎺╂ā銆佹洕鍏夌郴缁熻窡鍏夊埢鑳惰繖涓夎€呭強鍏剁浉浜掍綔鐢ㄦ渶缁堝喅瀹氫簡鍏夊埢鑳朵笂鍥惧舰鐨勫舰鐘躲€?/span>

 

鍏夊埢宸ヨ壓鐨勬渶缁堢洰鐨勬槸鍦ㄦ櫠鍦嗕笂瀹炵幇闆嗘垚鐢佃矾璁捐鎵€瑕佹眰鐨勫浘褰€傛暣涓繃绋嬬▼瀹為檯涓婂寘鎷袱閮ㄥ垎銆傜涓€閮ㄥ垎鏄妸璁捐鍥惧舰鍒跺鍒版帺妯′笂锛岀浜岄儴鍒嗘槸鎶婃帺妯′笂鍥惧舰鍒跺鍒版櫠鍦嗕笂銆傝繖閮ㄥ垎灏辨槸鎴戜滑鎵€璇寸殑鍏夊埢宸ヨ壓銆?/span>

 

鍏夊埢宸ヨ壓鐨勮瘎浠锋爣鍑?/span>

涓€涓泦鎴愮數璺殑鍒堕€犺繃绋嬶紙process flow锛夋槸鐢辫澶氬伐鑹哄崟鍏冿紙unit process锛夋瀯鎴愮殑锛屾瘡涓€涓伐鑹哄崟鍏冪殑杈撳嚭灏辨槸涓嬩竴涓伐鑹哄崟鍏冪殑杈撳叆銆傚伐鑹哄崟鍏冧箣闂寸殑琛旀帴鍜屾暣鍚堟槸鐢卞伐鑹洪泦鎴愶紙process integration锛夐儴闂ㄨ礋璐g殑銆?/span>

 

鍏夊埢宸ヨ壓鐨勮緭鍑哄氨鏄厜鍒昏兌涓婄殑鍥惧舰銆傚伐鑹洪泦鎴愰儴闂ㄥ鍏夊埢鑳朵笂鐨勫浘褰㈡湁涓ユ牸瑕佹眰锛?nbsp;濡備笅鍥撅紙a锛夋墍绀恒€?nbsp;棣栧厛鏄浘褰㈢殑绾垮锛屼竴鑸槸鍦ㄧ洰鏍囧€肩殑 /-锛?~10锛?涔嬪唴銆傚叾娆℃槸濂楀埢璇樊锛屽厜鍒昏兌涓婄殑鍥惧舰蹇呴』涓庤‖搴曚笂鐨勫弬鑰冨眰瀵瑰噯锛屽涓嬪浘锛坆锛夋墍绀猴紝鍏禭/y鏂瑰悜鐨勫亸宸繀椤诲皬浜庝竴涓瀹氱殑鍊笺€傞€氬父krf鍏夊埢鑳借揪鍒板皬浜?/-15nm鐨勫鍒昏宸紝arf鍏夊埢鑳借揪鍒板皬浜?/-7nm鐨勫鍒昏宸€傜涓夋槸鏅跺渾琛ㄩ潰鑳剁殑鍘氬害銆傚厜鍒诲悗鐨勪笅涓€閬撳伐鑹洪€氬父鏄弽搴旂瀛愬埢铓€锛坮eactive ion etch锛?nbsp;rie锛夈€傚敖绠″弽搴旂瀛愬埢铓€鏈夊緢楂樼殑閫夋嫨鎬с€備絾鍏夊埢鑳跺繀椤绘湁涓€瀹氱殑鍘氬害鎵嶈兘淇濊瘉鍦ㄥ埢铓€鐨勮繃绋嬩腑涓嶈鍏ㄩ儴娑堣€楁帀銆傜鍥涳紝鍏夊埢鑳堕闈晶瑙掑繀椤诲ぇ浜?5搴?/span>

 

     闅忕潃鎶€鏈妭鐐圭殑缂╁皬锛屽嵆绾垮鐨勭缉灏忥紝瀵规櫠鍦嗕笂绾垮鐨勫潎鍖€鎬э紙cdu锛夊拰濂楀埢璇樊鐨勮姹備篃鐩稿簲鍦版彁楂樸€侷trs鏇剧粡寤鸿锛孋du锛?sigma锛夊繀椤讳笉鑳借秴鍑虹嚎瀹界殑7%锛屽鍒昏宸笉鑳藉ぇ浜庣嚎瀹界殑20%銆傚浜?0nm 鍗婂懆鏈熻妭鐐癸紝cdu蹇呴』灏忎簬1銆?nm锛屽鍒昏宸繀椤诲皬浜?nm銆?/span>

     闆嗘垚鐢佃矾鐢熶骇鍘傚厜鍒诲伐绋嬪笀鐨勮亴璐e氨鏄淇濊瘉鍏夊埢鍚庡厜鍒昏兌涓婄殑鍥惧舰绗﹀悎浠ヤ笂鍚勯」闇€姹傘€備负浜嗗疄鐜拌繖涓洰鏍囷紝鍏夊埢宸ヨ壓涓殑鍚勯」鍙傛暟閮藉繀闇€鎺у埗鍦ㄤ竴涓緝灏忕殑鑼冨洿锛岃绉颁负宸ヨ壓绐楀彛锛坧rocess window锛夈€?nbsp;鍏夊埢宸ヨ壓鐨勭獥鍙d竴鑸槸閫氳繃鏇濆厜鑱氱劍-鑳介噺鐭╅樀锛坒ocus-energy matrix锛?nbsp;fem锛夋暟鎹潵纭畾鐨勩€傛洕鍏夋椂锛屽湪涓€涓柟鍚戜互鍥哄畾鐨勬闀挎敼鍙樿仛鐒﹀€硷紝鍙︿竴涓柟鍚戜互鍙︿竴涓浐瀹氱殑姝ラ暱鏀瑰彉鏀瑰彉鏇濆厜鑳介噺锛屽涓嬪浘鎵€绀恒€傛洕鍏夋樉褰卞畬鎴愬悗锛屾祴閲忔櫠鍦嗕笂鍥惧舰鐨勫昂瀵革紝寰楀埌鎵€璋撶殑鈥滲ossung鈥濆浘锛屽涓嬪浘鎵€绀恒€?nbsp;鍋囪鎵€瑕佺殑鍥惧舰鐨勭洰鏍囩嚎瀹斤紙target cd锛夋槸56nm銆?nbsp;鍏佽鐨勮寖鍥存槸 /-3nm锛堝湪鍥句腑鐢ㄦ柟妗嗘爣鍑猴級锛岄偅涔堝湪鏇濆厜鑳介噺绛変簬17銆?mj/cm2鏃剁殑鐒︽繁澶х害灏辨槸100nm銆?/span>

  

 

 

鍏夊埢宸ヨ壓绐楀彛鐨勭‘璁や篃闇€瑕佸吋椤惧埌鍏夊埢鑳剁殑鍝佽川锛屽厜鍒昏兌鍝佽川绠℃帶鍙楀埌涓嬪浘涓悇绉嶄富瑕佸弬鏁扮殑褰卞搷銆?/span>

 

 

鍏舵鍏夊埢宸ヨ壓浜у嚭鍥惧舰鐨勫ソ鍧忎篃鍙楀埌oly/cd杩欎袱涓珯鐐圭殑褰卞搷锛岃繖2绔欑浉鍏崇殑鎺у埗鍥犲瓙鍒椾妇濡備笅锛?/span>

 

 

 

         鏈€鍚庡厜鍒诲伐鑹轰骇鍑哄浘褰㈣〃闈㈢殑濂藉潖鐢盇di 杩欎釜绔欑偣鏉ユ楠岋紝杩欑珯鐨勬鏌ラ噸鐐瑰涓嬶細

 

 

缁撹锛?/span>

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2020骞?6鏈?2鏃?/span>

涓婁竴绡?/span>

涓嬩竴绡?/span>

鏃朵唬鑺瓨 鍗婂浣撶鏅郴鍒椻€斺€斿厜鍒诲伐鑹虹畝浠?/strong>