鏃朵唬鑺瓨 鍗婂浣撶湅绉戞櫘绯诲垪鈥斺€斿崐瀵间綋宸ヨ壓姒傝堪 钖勮啘宸ヨ壓锛圕vd锛?姹熻嫃鏃朵唬鍏ㄨ姱瀛樺偍绉戞妧鏈夐檺鍏徃-凯发网址是多少

浼撮殢缃戠粶鏃朵唬鐨勫叴璧凤紝鎴戜滑瀵硅姱鐗囩殑璁ょ煡涓嶅啀闄岀敓锛屽皬鍒版棩甯哥敓娲讳腑鐨勬墜鏈猴紝澶у埌鍥介槻绯荤粺锛屽澶勯兘绂讳笉寮€鑺墖锛岃€岃姱鐗囩┒绔熸槸浠€涔堝憿锛熷張鏄€庝箞鍒堕€犵殑鍛紵绠€鍗曟潵璇达紝鑺墖灏辨槸鎶婄數璺皬鍨嬪寲鐨勪竴绉嶆柟寮忥紝鍏跺埗閫犵殑杩囩▼灏卞鍚岀洊鎴垮瓙涓€鏍凤紝鍏堟湁鏅跺渾浣滀负鍦板熀锛屽啀閫氳繃涓€灞傚眰寰€涓婂彔鍔犵殑鍒堕€犳祦绋嬪悗锛屽氨鍙骇鍑哄繀瑕佺殑 ic 鑺墖銆傝€屾垜浠粖澶╄浠嬬粛鐨凜vd鎶€鏈氨鏄敤鍖栧娌夌н鏉ュ疄鐜拌杽鑶滃彔鍔犵殑涓€绉嶆柟寮忋€?/span>   

鍥?  ic鑺墖3d鍥?/span>

cvd鎶€鏈殑鐗圭偣锛?/span>

鍏锋湁娣€绉俯搴︿綆銆佽杽鑶滄垚鍒嗗拰鍘氬害鏄撲簬鎺у埗銆佸潎鍖€鎬у拰閲嶅鎬уソ銆佸彴闃惰鐩栦紭鑹€侀€傜敤鑼冨洿骞裤€佽澶囩畝鍗曠瓑涓€绯诲垪浼樼偣銆?/span>

cvd鏂规硶鍑犱箮鍙互娣€绉泦鎴愮數璺伐鑹轰腑鎵€闇€瑕佺殑鍚勭钖勮啘锛屼緥濡傛幒鏉傛垨涓嶆幒鏉傜殑sio2銆佸鏅剁銆侀潪鏅剁銆佹爱鍖栫銆侀噾灞?閽ㄣ€侀捈)绛夈€?/span>

杈冧负甯歌鐨?/span>cvd钖勮啘鍖呮嫭鏈夛細浜屾哀鍖栫锛堥€氬父鐩存帴绉颁负姘у寲灞傦級銆佹爱鍖栫銆佸鏅剁銆侀毦鐔旈噾灞炰笌杩欑被閲戝睘涔嬪叾纭呭寲鐗╃瓑銆?/span>

甯哥敤鐨?/span>cvd鎶€鏈湁锛?/span>

(1) 甯稿帇鍖栧姘旂浉娣€绉紙apcvd锛夛紱

(2) 浣庡帇鍖栧姘旂浉娣€绉紙lpcvd锛夛紱

(3) 绛夌瀛愬寮哄寲瀛︽皵鐩告穩绉紙pecvd锛夛紱


甯稿帇鍖栧姹界浉娣€绉?/span>(apcvd) (normal pressure cvd)

甯稿帇鍖栧姘旂浉娣€绉?/span>(apcvd)鏄寚鍦ㄥぇ姘斿帇涓嬭繘琛岀殑涓€绉嶅寲瀛︽皵鐩告穩绉殑鏂规硶锛岃繖鏄寲瀛︽皵鐩告穩绉渶鍒濇墍閲囩敤鐨勬柟娉曘€傝繖绉嶅伐鑹烘墍闇€鐨勭郴缁熺畝鍗曪紝鍙嶅簲閫熷害蹇紝骞朵笖鍏舵穩绉€熺巼鍙秴杩?000鍩?min锛岀壒鍒€備簬浠嬭川娣€绉紝浣嗘槸瀹冪殑缂虹偣鏄潎鍖€鎬ц緝宸紝鎵€浠ワ紝apcvd涓€鑸敤鍦ㄥ帤鐨勪粙璐ㄦ穩绉€?/span>

鍥?  甯稿帇鍖栧姘旂浉娣€绉?apcvd)娣€绉繃绋嬬ず鎰忓浘


浣庡帇鍖栧姹界浉娣€绉?/span>(lpcvd)

闅忕潃鍗婂浣撳伐鑹虹壒寰佸昂瀵哥殑鍑忓皬锛屽钖勮啘鐨勫潎鍖€鎬ц姹傚強鑶滃帤鐨勮宸姹備笉鏂彁楂橈紝鍑虹幇浜嗕綆鍘嬪寲瀛︽皵鐩告穩绉?/span>(lpcvd)銆備綆鍘嬪寲瀛︽皵鐩告穩绉槸鎸囩郴缁熷伐浣滃湪杈冧綆鐨勫帇寮轰笅鐨勪竴绉嶅寲瀛︽皵鐩告穩绉殑鏂规硶銆傝繖绉嶆妧鏈穩绉嚭鏉ョ殑钖勮啘鍧囧寑鎬у拰鍙伴樁瑕嗙洊鎬ц緝濂斤紝涓斿叿鏈夎緝浣庣殑娣€绉€熺巼鍜岃緝楂樼殑娣€绉俯搴︺€侺pcvd鎶€鏈笉浠呯敤浜庡埗澶囩澶栧欢灞傦紝杩樺箍娉涚敤浜庡悇绉嶆棤瀹氬舰閽濆寲鑶滃強澶氭櫠纭呰杽鑶滅殑娣€绉紝鏄竴绉嶉噸瑕佺殑钖勮啘娣€绉妧鏈€?/span>

鍥?  浣庡帇鍖栧姹界浉娣€绉?lpcvd)娣€绉繃绋嬬ず鎰忓浘


绛夌瀛愬寮哄寲瀛︽苯鐩告穩绉?/span>(pecvd)

绛夌瀛愪綋澧炲己鍖栧姘旂浉娣€绉?/span>(pecvd)鏄寚閲囩敤楂橀绛夌瀛愪綋椹卞姩鐨勪竴绉嶆皵鐩告穩绉妧鏈紝鏄竴绉嶅皠棰戣緣鍏夋斁鐢电殑鐗╃悊杩囩▼鍜屽寲瀛﹀弽搴旂浉缁撳悎鐨勬妧鏈€傝姘旂浉娣€绉殑鏂规硶鍙互鍦ㄩ潪甯镐綆鐨勮‖搴曟俯搴︿笅娣€绉杽鑶滐紝渚嬪鍦ㄩ摑(a1)涓婃穩绉疭i02銆傚伐鑹轰笂绛夌瀛愪綋澧炲己鍖栧姘旂浉娣€绉富瑕佺敤浜庢穩绉粷缂樺眰銆?/span>

鍥?  绛夌瀛愪綋澧炲己鍖栧姘旂浉娣€绉?pecvd)娣€绉繃绋嬬ず鎰忓浘


鍘熷瓙灞傛矇绉?/span>锛圓tomic layer deposition)

鍘熷瓙灞傛矇绉?/span>鏄竴绉嶅熀浜庤〃闈㈡皵璞″寲瀛﹀弽搴旂殑钖勮啘娌夌н鎶€鏈€傜敱浜庡井鐢靛瓙鍜屾繁浜氬井绫宠姱鐗囨妧鏈殑鍙戝睍瑕佹眰鍣ㄤ欢鍜屾潗鏂欑殑灏哄涓嶆柇闄嶄綆锛岃€屽櫒浠朵腑鐨勯珮瀹芥瘮涓嶆柇澧炲姞锛岃繖鏍锋墍浣跨敤鏉愭枡鐨勫帤搴﹂檷浣庤嚦鍑犱釜绾崇背鏁伴噺绾т互鍙婅姹傝緝濂界殑鍙伴樁瑕嗙洊鑳藉姏锛屽洜姝ゅ師瀛愬眰娌夌н鎶€鏈殑浼樺娍灏变綋鐜板嚭鏉ワ紝濡傚崟鍘熷瓙灞傞€愭娌夌н锛屾矇绉眰鏋佸潎鍖€鐨勫帤搴﹀拰浼樺紓鐨勫潎鍖€鎬э紝渚嬪tan ald娌夌н銆?/span>

鍥?  ald鍘熷瓙灞傛穩绉繃绋嬬ず鎰忓浘



2020骞?7鏈?8鏃?/span>

涓婁竴绡?/span>

涓嬩竴绡?/span>

鏃朵唬鑺瓨 鍗婂浣撶湅绉戞櫘绯诲垪鈥斺€斿崐瀵间綋宸ヨ壓姒傝堪 钖勮啘宸ヨ壓锛圕vd锛?/strong>