鏃朵唬鑺瓨鍗婂浣撶鏅郴鍒椻€斺€旂墿鐞嗘皵鐩告矇绉紙pvd锛変粙缁?姹熻嫃鏃朵唬鍏ㄨ姱瀛樺偍绉戞妧鏈夐檺鍏徃-凯发网址是多少

钖勮啘鎵€鐢ㄧ殑鎴愯啘鏂瑰紡, 鍙垎涓篜vd涓嶤vd涓ょ锛岀墿鐞嗘皵鐩告矇绉?(physical vapor deposition, 绠€绉癙vd) :鏄寚姘斾綋(鎴栫數娴?閫忚繃鐗╃悊鍙嶅簲鐨勬柟寮? 鐢熸垚鍥烘€佽杽鑶滅殑鎶€鏈€備紶缁熶笂鐨凱vd鍙垎涓鸿捀闀€銆佹簠闀€銆佺瀛愰晙銆傚寲瀛︽皵鐩告矇绉?(chemical vapor deposition, 绠€绉癈vd) :鏄寚鍒╃敤鍙嶅簲鐗?閫氬父涓烘皵浣?浜х敓鍖栧鍙嶅簲, 鐢熸垚鍥烘€佽杽鑶滅殑鎶€鏈€侾vd涓€鑸矇绉噾灞炶啘灞傦紙渚嬪锛欰l銆丄lcu銆乀i銆乀in绛夛級锛孋vd涓€鑸矇绉粙鐢垫潗鏂?渚嬪锛歋in銆丼io2绛?銆?/span>

钖勮啘娌夌н涓€鑸彲鍒嗕负5涓楠わ細1.瀛曟牳 / 鎴愭牳锛?.鏅剁矑鎴愰暱锛?.鏅剁矑鑱氶泦锛?.缁嗙紳濉ˉ锛?钖勮啘鎴愰暱銆?/span>



婧呴晙鐨勫師鐞? 闈舵潗锛堝锛欰lcu銆乀i绛夛級锛屽姞鐑櫒鎴栭潤鐢靛す鐢ㄤ簬鏀剧疆鏅跺渾鍜屽姞鐑櫠鍦嗭紱鐩存祦鐢垫簮浜х敓绛夌瀛愪綋锛屾彁渚涚洿娴佺數鍘嬪幓鍚稿紩姘╃瀛愭挒鍑婚澏鏉愶紱灏勯鍋忓帇锛堝彲閫夛級锛屼骇鐢熷亸鍘嬬數鍘嬪惛寮曢噾灞炵瀛愶紱閬尅鏉跨敤浜庝繚鎶よ厰浣撳涓嶈娌夌н鍒帮紱鐪熺┖鑵斾綋淇濇寔涓€瀹氬帇鍔涖€?/span>

     pvd鏈€澶х殑闄愬埗鏄~娲炶兘鍔涜緝宸紝瀹规槗浜х敓鎮獊锛屽湪娲炲彛杞鐨勫湴鏂癸紝鐢变簬钖勮啘娌夌н鐨勮搴﹀箍锛屽鏄撻€犳垚绐佸嚭鐨勭幇璞★紝鎮獊鐨勫舰鎴愪細瀵艰嚧娲炲彛灏佸彛锛屽湪鍗村湪娲炰腑褰㈡垚绌烘礊銆?/span>





     pvd娌夌н鎶€鏈紝涓烘敼鍠勫~瀛旇兘鍔涳紝鐢变紶缁熸簠灏勫崌绾т负鍑嗙洿鍣ㄥ拰闀胯厰璺濅袱绉嶇被鍨嬶紝涔嬪悗鍙戝睍涓篒mp锛圛onized metal plasma锛夈€?/span>

 

      鍑嗙洿鍣紙collimator锛?nbsp;pvd鍘熺悊鏄湪闈舵潗鍜屽渾鐗囦箣闂村姞涓€涓叚瑙掑瓟鐘剁殑鍑嗙洿鍣紝鐢ㄤ簬绛涢櫎鎺変粠闈舵潗婧呭皠涓嬫潵鐨勮緝澶у叆灏勮閲戝睘鏉愭枡锛屽噯鐩村櫒鑵斾綋娌夌н閫熺巼杈冩參锛?/span>pm鍛ㄦ湡杈冪煭銆?/span>


      闀胯窛pvd鍘熺悊鏄澶ф櫠鍦嗗埌闈舵潗鐨勮窛锛堜紶缁熸簠灏勪竴鑸负190mm,闀胯窛婧呭皠涓?/span>240mm锛?/span>,绛涢櫎鎺変粠闈舵潗婧呭皠涓嬫潵鐨勮緝澶у叆灏勮閲戝睘鏉愭枡锛岄暱璺濊厰浣撴矇绉€熺巼杈冩參锛屽潎鍖€鎬ц緝宸紝pm鍛ㄦ湡鐭€?/span>

     imp锛?/span>ionized metal plasma锛?nbsp;rf绾垮湀鐢ㄤ簬鐢电閲戝睘鍘熷瓙锛屼娇鍏跺彉鎴愰噾灞炵瀛愶紝rf bias 鍦ㄦ櫠鍦嗚〃闈㈠舰鎴愯礋鍋忓帇鍚稿紩閲戝睘绂诲瓙鍨傜洿鐨勮繘鍏ュ瓟鍐咃紝鎻愰珮搴曢儴鍙伴樁瑕嗙洊銆?/span> 

pvd婧呭皠鍏ュ皠瑙掑垎甯?/span>

鍙伴樁瑕嗙洊鐜?/span>

搴曢儴鍙伴樁瑕嗙洊=b/t

渚у鍙伴樁瑕嗙洊鐜?/span>=c/t

鎷愯鍙伴樁瑕嗙洊鐜?/span>=d/t

涓句緥锛?/span>

搴曢儴鍙伴樁瑕嗙洊鐜?/span>=b/t=500/1000=50%



2020骞?7鏈?4鏃?/span>

涓婁竴绡?/span>

涓嬩竴绡?/span>

鏃朵唬鑺瓨鍗婂浣撶鏅郴鍒椻€斺€旂墿鐞嗘皵鐩告矇绉紙pvd锛変粙缁?/strong>